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Title: An XPS study of Au alloyed Al–O sputtered coatings
Authors: Figueiredo, N. M. 
Carvalho, N. J. M. 
Cavaleiro, A. 
Keywords: XPS; Al2O3–Au; Au clusters; Alumina; Charging effect
Issue Date: Apr-2011
Publisher: Elsevier
Citation: FIGUEIREDO, N. M.; CARVALHO, N. J. M.; CAVALEIRO, A. - An XPS study of Au alloyed Al–O sputtered coatings. "Applied Surface Science". ISSN 0169-4332. 257:13 (2011) 5793–5798
Serial title, monograph or event: Applied Surface Science
Volume: 257
Issue: 13
Abstract: The focus of this research is the X-ray photoelectron spectroscopy (XPS) analysis of thin films consisting of Au metal clusters embedded in a dielectric matrix of Al-O coatings. The coatings were deposited by co-sputtering an Al+Au target in a reactive atmosphere with Au contents up to 8 at.%. The Al-O matrix was kept amorphous even after annealing at 1000°C. In the as-deposited films the presence of Au clusters with sizes smaller than 1-2 nm (not detected by XRD) was demonstrated by XPS. With increasing annealing temperature, Au clustering in the dielectric matrix was also confirmed by XPS, in agreement with XRD results.
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2011.01.104
Rights: openAccess
Appears in Collections:I&D CEMMPRE - Artigos em Revistas Internacionais
FCTUC Eng.Mecânica - Artigos em Revistas Internacionais

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