Please use this identifier to cite or link to this item:
https://hdl.handle.net/10316/4230
Title: | Structural evolution in ZrNxOy thin films as a function of temperature | Authors: | Cunha, L. Vaz, F. Moura, C. Rebouta, L. Carvalho, P. Alves, E. Cavaleiro, A. Goudeau, Ph. Rivière, J. P. |
Keywords: | Zirconium oxynitride; PVD coatings; Decorative coatings; Heat treatment | Issue Date: | 2006 | Citation: | Surface and Coatings Technology. 200:9 (2006) 2917-2922 | Abstract: | Single-layered zirconium oxynitride (ZrNxOy) thin films have been deposited on steel substrates, at a constant temperature of 300 °C, by radiofrequency (rf) reactive magnetron sputtering of a pure Zr target in an argon-oxygen-nitrogen atmosphere. The variation of the flow rate of the reactive gases enabled changes in the composition and structure of the films. X-ray diffraction (XRD) and glancing incidence X-ray diffraction (GIXRD) were used to study the as-deposited films and their structural changes during or after heat treatment, from 400 to 900 °C, in controlled atmosphere and in vacuum. | URI: | https://hdl.handle.net/10316/4230 | DOI: | 10.1016/j.surfcoat.2004.09.030 | Rights: | openAccess |
Appears in Collections: | FCTUC Eng.Mecânica - Artigos em Revistas Internacionais |
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