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Title: | Effect of Substrate Bias Voltage on Microstructure and Mechanical Properties of Cr-Nb-Ti-Zr-N-O Ceramic Thin Films Produced by Reactive Sputtering | Authors: | Ataie, Sayed Alireza Qashqay, S. Mahmoudi Zamani-Meymian, Mohammad Reza Ferreira, Fábio |
Keywords: | thin film; ceramic coating; fractal parameters; indentation; scratch | Issue Date: | 2023 | Publisher: | MDPI | Project: | UIDB/00285/2020 LA/P/0112/2020 |
Serial title, monograph or event: | Coatings | Volume: | 13 | Issue: | 7 | URI: | https://hdl.handle.net/10316/112414 | ISSN: | 2079-6412 | DOI: | 10.3390/coatings13071141 | Rights: | openAccess |
Appears in Collections: | I&D CEMMPRE - Artigos em Revistas Internacionais FCTUC Eng.Mecânica - Artigos em Revistas Nacionais |
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Effect-of-Substrate-Bias-Voltage-on-Microstructure-and-Mechanical-Properties-of-CrNbTiZrNO-Ceramic-Thin-Films-Produced-by-Reactive-SputteringCoatings.pdf | 11.92 MB | Adobe PDF | View/Open |
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