Please use this identifier to cite or link to this item: https://hdl.handle.net/10316/4217
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dc.contributor.authorFernandes, A. C.-
dc.contributor.authorCarvalho, P.-
dc.contributor.authorVaz, F.-
dc.contributor.authorLanceros-Méndez, S.-
dc.contributor.authorMachado, A. V.-
dc.contributor.authorParreira, N. M. G.-
dc.contributor.authorPierson, J. F.-
dc.contributor.authorMartin, N.-
dc.date.accessioned2008-09-01T10:44:06Z-
dc.date.available2008-09-01T10:44:06Z-
dc.date.issued2006en_US
dc.identifier.citationThin Solid Films. 515:3 (2006) 866-871en_US
dc.identifier.urihttps://hdl.handle.net/10316/4217-
dc.description.abstractTiCxOy films with various O/Ti ratios have been deposited by DC magnetron sputtering, using C pieces incrusted in a Ti target erosion area. Composition analysis revealed the existence of three different growth regimes: (i) zone I, corresponding to films with metallic-like appearance, and atomic ratios O/Ti below one; (ii) zone II, with films revealing interference-like colours, and atomic ratios O/Ti higher than 2. Between these two regions, there was a transition zone T, where the atomic ratio O/Ti is between one and two. The films within this zone revealed a brown colour. X-ray diffraction (XRD) structural characterization results showed an evolution from a mixed Ti(C,O) phase at lower O/Ti ratio, to a quasi-amorphous structure within zone T, and poorly crystallized rutile and anatase TiO2 at the highest O/Ti ratios (zone II). These different structural arrangements resulting from different film's compositions had clear effects on electrical resistivity, whose values increased from about 7 × 102 to 2 × 1011 [mu][Omega] cm with increase of the O/Ti ratio. Fourier-transform infrared spectroscopy (FTIR) was used to further confirm the different nature of films structure and, thus, to better understand their properties variation. The observed behaviour was found to be in straight correlation with those of XRD.en_US
dc.description.urihttp://www.sciencedirect.com/science/article/B6TW0-4KWK0WW-3/1/f0de0f5875ba8dd82aec3345e10bf933en_US
dc.format.mimetypeaplication/PDFen
dc.language.isoengeng
dc.rightsopenAccesseng
dc.subjectTitanium oxycarbideen_US
dc.subjectSputteringen_US
dc.subjectStructureen_US
dc.subjectResistivityen_US
dc.titleProperty change in multifunctional TiCxOy thin films: Effect of the O/Ti ratioen_US
dc.typearticleen_US
dc.identifier.doi10.1016/j.tsf.2006.07.047-
item.openairetypearticle-
item.languageiso639-1en-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.cerifentitytypePublications-
item.grantfulltextopen-
item.fulltextCom Texto completo-
Appears in Collections:FCTUC Eng.Mecânica - Artigos em Revistas Internacionais
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