UIDB/00285/2020

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UIDB/00285/2020

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Subject:  HiPIMS
Subject:  deep oscillation magnetron sputtering (DOMS)

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Issue DateTitleAuthor(s)TypeAccess
12020Effect of the Substrate Biasing on the Structure and Properties of Tantalum Coatings Deposited Using HiPIMS in Deep Oscillations Magnetron Sputtering ModeFerreira, Fábio ; Cavaleiro, Albano ; Oliveira, João articleopenAccess