Please use this identifier to cite or link to this item: http://hdl.handle.net/10316/4291
DC FieldValueLanguage
dc.contributor.authorCarvalho, S.-
dc.contributor.authorRebouta, L.-
dc.contributor.authorCavaleiro, A.-
dc.contributor.authorRocha, L. A.-
dc.contributor.authorGomes, J.-
dc.contributor.authorAlves, E.-
dc.date.accessioned2008-09-01T10:45:22Z-
dc.date.available2008-09-01T10:45:22Z-
dc.date.issued2001en_US
dc.identifier.citationThin Solid Films. 398-399:(2001) 391-396en_US
dc.identifier.urihttp://hdl.handle.net/10316/4291-
dc.description.abstractIn this work (Ti,Si,Al)N films were deposited using only rf or a combination of rf and d.c. reactive magnetron sputtering. Chemical composition, thickness, film structure and mechanical properties of the films were investigated by means of Rutherford backscattering (RBS), electron microprobe analysis (EPMA), ball-cratering, X-ray diffraction (XRD) and ultramicroindentation, respectively. All samples showed high hardness values, exceeding, in some cases, 50 GPa. XRD results revealed the formation of a mixture of two phases whose structure is similar to TiN. One phase is noted as being TiN bulk with a lattice parameter of 0.428 nm and develops only in conditions of high surface mobility. This behaviour can be associated with the segregation of the SiNx phase, though the formation of an amorphous AlN phase cannot be excluded. Another phase, which is noted as Ti---Si---Al---N (a[approximate]0.420 nm), where Si and Al atoms substitute the Ti atoms on the TiN lattice, develops in situations of lower surface mobility. The thermal stability of these coatings was studied by thermal treatments in a vacuum atmosphere, where it was found that a small increase in hardness was obtained after 1 h heat treatment at 800°C.en_US
dc.description.urihttp://www.sciencedirect.com/science/article/B6TW0-44JDBYS-2G/1/d7819a04df29f7a493595f68509bc963en_US
dc.format.mimetypeaplication/PDFen
dc.language.isoengeng
dc.rightsopenAccesseng
dc.subjectNanocompositesen_US
dc.subjectSuperhard coatingsen_US
dc.subjectTi-Si-Al-Nen_US
dc.subjectMicrostructureen_US
dc.subjectThermal stabilityen_US
dc.subjectWear coefficienten_US
dc.titleMicrostructure and mechanical properties of nanocomposite (Ti,Si,Al)N coatingsen_US
dc.typearticleen_US
dc.identifier.doi10.1016/S0040-6090(01)01348-7-
item.fulltextCom Texto completo-
item.languageiso639-1en-
item.grantfulltextopen-
Appears in Collections:FCTUC Eng.Mecânica - Artigos em Revistas Internacionais
Files in This Item:
File Description SizeFormat
file20fc6fbe02c14d4bbae0bb4d860c5c97.pdf138.34 kBAdobe PDFView/Open
Show simple item record

WEB OF SCIENCETM
Citations 50

17
checked on Oct 2, 2021

Page view(s) 50

599
checked on Oct 15, 2021

Download(s)

286
checked on Oct 15, 2021

Google ScholarTM

Check

Altmetric

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.